JPH03100494U - - Google Patents
Info
- Publication number
- JPH03100494U JPH03100494U JP724590U JP724590U JPH03100494U JP H03100494 U JPH03100494 U JP H03100494U JP 724590 U JP724590 U JP 724590U JP 724590 U JP724590 U JP 724590U JP H03100494 U JPH03100494 U JP H03100494U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- space
- mounting plate
- vacuum chamber
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000005192 partition Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP724590U JPH03100494U (en]) | 1990-01-29 | 1990-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP724590U JPH03100494U (en]) | 1990-01-29 | 1990-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03100494U true JPH03100494U (en]) | 1991-10-21 |
Family
ID=31510907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP724590U Pending JPH03100494U (en]) | 1990-01-29 | 1990-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03100494U (en]) |
-
1990
- 1990-01-29 JP JP724590U patent/JPH03100494U/ja active Pending